Optical element module

ABSTRACT

An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.12/015,894, filed Jan. 17, 2008, which is a continuation under 35 U.S.C.§120 of international application PCT/EP2006/064427, filed Jul. 19,2006, which claims the benefit under 35 U.S.C. 119(e)(1) of provisionalU.S. Patent Application Ser. No. 60/700,517 filed 19 Jul. 2005. Theentire contents of these applications are hereby incorporated herein byreference.

FIELD

The disclosure relates to optical element modules used in exposureprocesses, in particular to optical element modules of microlithographysystems. It further relates to optical element units comprising suchoptical element modules. It also relates to optical exposure apparatusescomprising such optical element units. Furthermore, it relates to amethod of holding an optical element. The disclosure may be used in thecontext of photolithography processes for fabricating microelectronicdevices, in particular semiconductor devices, or in the context offabricating devices, such as masks or reticles, used during suchphotolithography processes.

BACKGROUND

Typically, the optical systems used in the context of fabricatingmicroelectronic devices such as semiconductor devices comprise aplurality of optical elements, such as lenses and mirrors etc., in thelight path of the optical system. Those optical elements usuallycooperate in an exposure process to transfer an image formed on a mask,reticle or the like onto a substrate such as a wafer. Said opticalelements are usually combined in one or more functionally distinctoptical element groups. These distinct optical element groups may beheld by distinct optical element units. Such optical element units areoften built from a stack of optical element modules holding one or moreoptical elements. These optical element modules usually comprise anexternal generally ring shaped support device supporting one or moreoptical element holders each, in turn, holding an optical element.

Optical element groups comprising at least mainly refractive opticalelements, such as lenses, mostly have a straight common axis of symmetryof the optical elements usually referred to as the optical axis.Moreover, the optical element units holding such optical element groupsoften have an elongated substantially tubular design due to which theyare typically referred to as lens barrels.

Due to the ongoing miniaturization of semiconductor devices there is apermanent need for enhanced resolution of the optical systems used forfabricating those semiconductor devices. This need for enhancedresolution obviously pushes the need for an increased numerical apertureand increased imaging accuracy of the optical system.

Furthermore, to reliably obtain high-quality semiconductor devices it isnot only necessary to provide an optical system showing a high degree ofimaging accuracy. It is also necessary to maintain such a high degree ofaccuracy throughout the entire exposure process and over the lifetime ofthe system. As a consequence, the optical elements of such an opticalsystem is desirably supported in a defined manner in order to maintain apredetermined spatial relationship between said optical elements toprovide a high quality exposure process.

In this context there exist, among others, two general requirements forthe support of optical elements of the optical system. One is that therigidity of the support system of the optical elements has to be as highas possible in certain directions, in particular in the direction of theoptical axis, to keep the resonant frequencies of the system as high aspossible. Furthermore, deformations of the optical elements of theoptical system are to be avoided to the greatest possible extent inorder to keep imaging errors resulting from such deformations as low aspossible.

One such imaging error is for example stress induced birefringence ofrefractive optical elements. Such stress induced birefringence mainlyresults from stresses introduced into the optical element via itsperipheral support structure and radially propagating through theoptically used area of the optical element. Such stresses are oftenthermally induced, resulting from differences in the coefficient ofthermal expansion (CTE) of the optical element and its peripheralsupport structure. Variations in the temperature situation of theoptical element and its peripheral support structure lead to relativemovements between the optical element and its peripheral supportstructure. These relative movements are counteracted by the holdingforces acting between the optical element and its peripheral supportstructure leading to the above undesired stress situations.

To avoid thermally induced stresses and deformations within an opticalelement due to differences in the coefficient of thermal expansion ofthe optical element and its optical element holder, it is known toconnect the optical element and its optical element holder viadeformation uncoupling elements. These deformation uncoupling elementsgenerally allow for relative movements between the optical element andits optical element holder.

These deformation uncoupling elements may provide a reduction of thestresses and, thus, the deformations introduced into the opticalelement. However, they have the disadvantage that they also reduce therigidity of the support system. To deal with this effect, the rigidityof the uncoupling elements might be increased, but this would reducetheir deformation uncoupling abilities leading to increased stressesand, thus, the deformations introduced into the optical element.

Another approach to deal with this problem is known from US 2001/0039126A1 (to Ebinuma et al.). Here, it is provided for an adaptation of thecoefficients of thermal expansion between an optical element and asupport ring contacting the optical element in order to reduce theintroduction of thermally induced deformations into the optical elementresulting from differences in the coefficients of thermal expansion.However, this solution my have the disadvantage that, for certainoptical elements with a certain coefficient of thermal expansion, theadaptation of the coefficient of thermal expansion may only be achievedwith comparatively expensive materials for such large parts as thesupport ring.

SUMMARY

It is thus an object of the disclosure to, at least to some extent,overcome the above disadvantages and to provide good and long termreliable imaging properties of an optical system used in an exposureprocess.

It is a further object of the disclosure to increase imaging accuracy ofan optical system used in an exposure process by reducing thermallyinduced stresses introduced into an optical element of the opticalsystem.

It is a further object of the disclosure to increase imaging accuracy ofan optical system used in an exposure process by reducing stress inducedbirefringence introduced into an optical element of the optical systemvia its support structure.

These objects are achieved which is based on the teaching that areduction in the deformations introduced into an optical element of theoptical system via its support structure and a high rigidity of thesupport mechanism for the optical element may be achieved when at leastone of the module components of an optical element module is adapted toprovide, compared to conventional deformation uncoupling elements, atleast a reduction of forces introduced into the optical element upon athermally induced position change in the relative position between theoptical element and the optical element holder by maintaining, at thesame time, a high rigidity of the support mechanism. This reduction ofdisturbing forces upon maintained support rigidity may be achieved inseveral ways.

One solution is to provide a contact element that compensates by itsthermal expansion properties for the difference in the coefficient ofthermal expansion between the optical element and the associated opticalelement holder such that, at least at a given variation in thetemperature situation, no relative shift between the contact points ofthe module components occurs. With this solution, the thermally inducedintroduction of disturbing forces into the optical element may even becompletely avoided. This solution has the further advantage that,compared to the known adaptation of the coefficients of thermalexpansion of the optical element and the optical element holder, withthe contact element only a relatively small part has to be adapted tothe given coefficient of thermal expansion situation. Furthermore, at agiven coefficient of thermal expansion situation, adaptation may beprovided easily by simply adapting the effective distance between thecontact points of the contact element with the optical element and theoptical element holder, respectively.

A second solution is to allow for a relative movement between theoptical element and the associated optical element holder at a variationin the temperature situation, but to reduce the disturbing forcesintroduced into the optical element as a result of such a relativemovement. Since these disturbing forces predominantly result fromfrictional forces between the coupled module components, a reduction ofthese frictional forces at the interface of the coupled modulecomponents is provided. This may be achieved by adapting the frictionalproperties of the module components at the interface location to providea low friction contact. Furthermore, the relative motion between themodule components may be adapted to provide a type of motion with lowfriction. In some embodiments, due to the low frictional forcestransmitted at such a motion type, a rolling motion is provided at theinterface location between the module components.

A third solution is to overall reduce, under normal operatingconditions, the holding forces exerted on the optical element and, thus,also the disturbing forces introduced into the optical element at athermally induced relative movement between the module components. Thissolution is based on the concept that the holding forces usuallycounteract also the thermally induced relative movement between themodule components and, thus, have an influence on the frictional forcesintroduced into the optical element at such a relative movement betweenthe module components. Usually, due to the manufacture and mounting ofthe optical system at a location different from the location of itslater use, the holding forces provided for the optical elements do notonly account for the forces occurring under normal operating conditionsof the optical system but also have to account for considerably higherabnormal forces occurring during, for example, transport of the opticalsystem. Thus, in conventional systems, holding forces are considerablyhigher than necessary in normal use. This obviously leads toconsiderable disturbing forces introduced into the optical element at athermally induced relative movement between the module components. Thesedisturbing forces can be reduced by providing a securing device which isonly activated under abnormal load conditions in order to hold theoptical element in place. Thus, under normal operating conditions,holding forces which are considerably lower than in conventional systemsmay be applied to the optical element leading, in turn, to reduceddisturbing forces.

It will be appreciated that arbitrary combinations of the abovesolutions may be selected to combine their beneficial effects and tofurther reduce the disturbing forces introduced into the optical elementat thermally induced relative movements between some of the modulecomponents.

Thus, according to a first aspect of the disclosure there is provided anoptical element module comprising an optical element, an optical elementholder and a first contact element. The optical element has a firstcoefficient of thermal expansion. The optical element holder holds theoptical element via the first contact element and has a secondcoefficient of thermal expansion, the second coefficient of thermalexpansion being different from the first coefficient of thermalexpansion. A first contact point is formed on a first module component,the first module component being one of the optical element and theoptical element holder. The first contact element has a second contactpoint and a third coefficient of thermal expansion. At a firsttemperature situation, the first contact point contacts the secondcontact point at a first location. Furthermore, the first contactelement contacts a second module component at a second location, thesecond location, at the first temperature situation, being located at afirst contact location distance from the first location, and the secondmodule component being different from the first module component andbeing one of the optical element and the optical element holder. Atleast one of the third coefficient of thermal expansion and the contactlocation distance is selected such that, at a given second temperaturesituation different from the first temperature situation, a thermallyinduced modification in the size of the first contact element withrespect to the first temperature situation compensates for thedifference between the first coefficient of thermal expansion and thesecond coefficient of thermal expansion such that, at the secondtemperature situation, there is substantially no shift between the firstcontact point and the second contact point.

According to a second aspect of the disclosure there is provided anoptical element module comprising an optical element, an optical elementholder and a first contact element. The optical element has a firstcoefficient of thermal expansion. The optical element holder holds theoptical element via the first contact element and has a secondcoefficient of thermal expansion, the second coefficient of thermalexpansion being different from the first coefficient of thermalexpansion. One of the optical element and the optical element holderforms a first module component and one of the optical element and theoptical element holder forms a second module component being differentfrom the first module component. A first contact surface is formed onthe first module component, the first contact element having a curvedsecond contact surface contacting the first contact surface. The firstcontact element is adapted such that the second contact surface executesa rolling motion with respect to the first contact surface upon athermally induced change in the relative position between the opticalelement and the optical element holder.

According to a third aspect of the disclosure there is provided anoptical element module comprising a plurality of module components. Themodule components comprise an optical element, an optical element holderand a contact element. The optical element has a first coefficient ofthermal expansion. The optical element holder holds the optical elementvia the first contact element and has a second coefficient of thermalexpansion, the second coefficient of thermal expansion being differentfrom the first coefficient of thermal expansion. At least one of themodule components is adapted to provide at least a reduction of forcesintroduced into the optical element upon a thermally induced positionchange in the relative position between the optical element and theoptical element holder, the position change resulting from a temperaturesituation variation in a temperature situation of the plurality ofmodule components.

According to a fourth aspect of the disclosure there is provided anoptical element unit comprising a plurality of optical element modulesconnected to each other and supporting a plurality of optical elements.The plurality of optical element modules comprises a first opticalelement module being an optical element module.

According to a fifth aspect of the disclosure there is provided anoptical exposure apparatus for transferring an image of a pattern formedon a mask onto a substrate comprising a light path, a mask locationlocated within the light path and receiving the mask, a substratelocation located at an end of the light path and receiving the substrateand an optical element unit located within the light path between themask location and the and the substrate location.

According to a sixth aspect of the disclosure there is provided a methodof holding an optical element comprising, in a first step, providing aplurality of module components, the module components comprising anoptical element, an optical element holder and a contact element, and,in a second step, holding the optical element using the optical elementholder, the optical element holder holding the optical element via thecontact element. The optical element having a first coefficient ofthermal expansion. The optical element holder has a second coefficientof thermal expansion, the second coefficient of thermal expansion beingdifferent from the first coefficient of thermal expansion. At least oneof the module components is adapted to provide at least a reduction offorces introduced into the optical element upon a thermally inducedposition change in the relative position between the optical element andthe optical element holder, the position change resulting from atemperature situation variation in a temperature situation of theplurality of module components.

Further aspects and embodiments of the disclosure will become apparentfrom the dependent claims and the following description of preferredembodiments which refers to the appended figures. All combinations ofthe features disclosed, whether explicitly recited in the claims or not,are within the scope of the disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic representation of an optical exposure apparatuscomprising preferred embodiments of an optical element unit and opticalelement modules;

FIG. 2 is a perspective view of a schematic sectional representation ofa part of an optical element unit of the optical exposure apparatus ofFIG. 1;

FIG. 3 is a perspective view of schematic sectional representation ofanother part of the optical element unit along line III-Ill of FIG. 2;

FIG. 4 is a block diagram of a method of holding an optical element;

FIG. 5 is a schematic sectional representation of a part of a furtheroptical element module used in the optical exposure apparatus of FIG. 1;

FIG. 6A is a schematic perspective view of a further contact elementthat may be used in the optical element module of FIG. 5;

FIG. 6B is another schematic view of the contact element of FIG. 6A;

FIG. 7A is a schematic view of a part of a further optical elementmodule used in the optical exposure apparatus of FIG. 1;

FIG. 7B is a schematic view of the detail B of FIG. 7A;

FIG. 8A is a schematic view of a part of a further optical elementmodule used in the optical exposure apparatus of FIG. 1;

FIG. 8B is a schematic view of the detail B of FIG. 8A.

DETAILED DESCRIPTION OF THE DISCLOSURE First Embodiment

In the following, a first preferred embodiment of an optical exposureapparatus 1 comprising an optical projection system 2 with an opticalelement unit 3 will be described with reference to FIGS. 1 and 2.

The optical exposure apparatus 1 is adapted to transfer an image of apattern formed on a mask 4 onto a substrate 5. To this end, the opticalexposure apparatus 1 comprises an illumination system 6 illuminatingsaid mask 4 and the optical element unit 3. The optical element unit 3projects the image of the pattern formed on the mask 4 onto thesubstrate 5, e.g. a wafer or the like.

To this end, the optical element unit 3 holds an optical element group7. This optical element group 7 is held within a housing 3.1 of theoptical element unit 3. The optical element group 7 comprises a numberof optical elements 107 and 207 as well as optical elements 407 and 507such as lenses, mirrors or the like. These optical elements 107, 207,407, 507 are aligned along a folded optical axis 3.2 of the opticalelement unit 3

The optical projection system 2 receives the part of the light pathbetween the mask 4 and the substrate 5. Its optical elements 107, 207,407, 507 cooperate to transfer the image of the pattern formed on themask 4 onto the substrate 5 located at the end of the light path. Toincrease the numerical aperture NA of the optical projection system 2,the optical projection system 2 may comprise an immersion zone locatedbetween the lower end of the optical element unit 3 and the substrate 5.

The optical element unit 3 is composed of a plurality of optical elementmodules 3.3 and 3.4, optical element modules 3.5 and 3.6 as well as anoptical element module 3.7 stacked and tightly connected to form theoptical element unit 3. Each optical element module 3.3 to 3.6 holds oneor more of the optical elements 107, 207, 407, 507, respectively. Theoptical element module 3.7 is an interface module holding a reflectingoptical element 12 used to fold the optical axis 3.2. The opticalelement module 3.7 is an interface module providing an interface for therespective module stack.

FIG. 2 shows a schematic perspective view of a sectional representationof a part of the optical element module 3.3 of the optical element unit3 at a first temperature situation T1 of the optical element unit 3. Thefirst temperature situation T1 is characterized by a certain temperatureprofile within the components of the optical element unit 3.

The optical element 107 of the optical element module 3.3 is arotationally symmetric lens having an optical axis 107.1. The lens 107is made of Quartz (SiO₂) and has a first coefficient of thermalexpansion.

The lens 107 is usually positioned in space such that the optical axis107.1 of the lens 107 is substantially collinear with the optical axis3.2 of the optical element unit 3. It should be noted that the positionof the optical axis 107.1 of the lens 107 shown in FIG. 2 is not toscale. In reality, the optical axis 107.1 is located at a distance fromthe outer circumference of the lens 107 that by far exceeds the distanceshown in FIG. 2.

The lens 107 is held by an optical element holder in the form of a ringshaped lens holder 108 which, in turn, is held by a ring shaped frameelement 109. The lens holder 108 is made of Invar that has a secondcoefficient of thermal expansion different from, namely larger than thefirst coefficient of thermal expansion of the lens 107. The lens holder108 holds the lens 107 in place via a plurality of first contactelements 110 and a plurality of second contact elements 111. In thesectional view of FIG. 2, half of a first contact element 110 and halfof a second contact element 111 is shown, both contact elements 110 and111 being symmetric with respect to the sectional plane.

In the embodiment shown, three first contact elements 110 and threesecond contact elements 111 are evenly distributed at the innercircumference of the lens holder 108. However, it will be appreciatedthat, with other embodiments of the disclosure, a different number offirst and/or second contact elements may be provided. Thus, for example,a large number of narrowly spaced first and/or second contact elementsmay be formed to provide a configuration similar to the one disclosed inthe context of FIG. 2 of U.S. Pat. No. 6,392,825 B1 (Trunz et al.), theentire disclosure of which is hereby incorporated herein by reference.In such a configuration, the respective first and/or second contactelements may be formed by a radially resilient element similar to theones disclosed in the context of FIG. 4 of U.S. Pat. No. 4,733,945(Bacich), the entire disclosure of which is hereby incorporated hereinby reference. Furthermore, these first and/or second contact elementsmay be formed as separate elements or monolithically connected—in groupsor altogether—via a contact element connecting element, e.g. aconnecting ring similar to the one shown in FIG. 2 of U.S. Pat. No.6,392,825 B1 (Trunz et al.), which is then connected lens holder.Furthermore, only one type of contact elements may be provided. Forexample, only the lower first contact elements may be provided tosupport the lens from below.

At the first temperature situation T1, a first contact nose 110.1 formedon one end of the first contact element 110 contacts the lens 107 at afirst location 112. Thereby a first contact point 107.2 of a plane firstcontact surface 107.3 of the lens 107 is contacted by a second contactpoint 110.2 on the first contact nose 110.1 of the first contact element110. Furthermore, the first contact element 110 contacts the lens holder108 at a second location 113, where the first contact element 110 isconnected to the lens holder 108 by means of screws or any othersuitable fastening technique.

Similarly a second contact nose 111.1 formed on one end of the secondcontact element contacts the lens 107 at a third location 114. Thereby athird contact point 107.4 of a plane third contact surface 107.5 of thelens 107 is contacted by a fourth contact point 111.2 on the secondcontact nose 111.1 of the second contact element 111. Furthermore, thesecond contact element 111 contacts the lens holder 108 at a fourthlocation 115, where the second contact element 111 is connected to thelens holder 108 by means of screws or any other suitable fasteningtechnique.

It will be appreciated that, with other embodiments of the disclosure,the first and third contact surface may be curved surfaces as well.Furthermore, the optical element may form contact one or both noses aswell, while one or both contact elements form plane contact surfaces.

Along the optical axis 107.1, the first location 112 is aligned with thethird location 114 and the second location 113 is aligned with thefourth location 115. Thus, both, the first location 112 and the secondlocation 113 as well as the third location 114 and the fourth location115 are spaced apart in a radial direction 116 of the optical elementmodule 3.3 by a contact location distance D.

In general, in the radial direction 116, as a function of thetemperature situation T and the first coefficient of thermal expansionα_(L) of the lens 107, the first and third contact point 107.2 and 107.4are located at a radius L(T;α_(L)) from the optical axis 107.1.Furthermore, as a function of the temperature situation T and the secondcoefficient of thermal expansion α_(R) of the lens holder 108, thesecond location 113 and the third location 115 are located at a radiusR(T;α_(R)) from the optical axis 107.1. Thus, as a function of thetemperature situation T, the first coefficient of thermal expansionα_(L) and the second coefficient of thermal expansion αR, the contactlocation distance D(T;α_(L);α_(R)) follows the equation:

D(T;α _(L);α_(R))=R(T;α_(R))−L(T;α _(L))   (1)

The first contact element 110 is designed such that, at the firsttemperature situation T1 shown in FIG. 2, the distance E in the radialdirection 116 between its second contact point 110.2 and the secondlocation 113 (where the first contact element 110 is fixedly connectedto the lens holder 108) is equal to the contact location distanceD(T;α_(L);α(_(R)). Furthermore, the second contact element 111 isdesigned such that, at the first temperature situation T1 shown in FIG.2, the distance E in the radial direction 116 between its fourth contactpoint 111.2 and the fourth location 115 (where the second contactelement 111 is fixedly connected to the lens holder 108) is also equalto the contact location distance D(T;α_(L);α_(R)).

In general, the distance E again is a function of the temperaturesituation T and of the coefficient of thermal expansion α_(E) of therespective contact element 110, 111, i.e. E(T;α_(E)). Thus, at the firsttemperature situation T1 the following equation is valid:

D(T1;α_(L);α_(R))=E(T1;α_(E))   (2)

It should be noted that, in the embodiment shown in FIG. 2, the firstand second contact element 110, 111 are made of the same material havinga third coefficient of thermal expansion. However it will be appreciatedthat they may also be made of different materials with differentcoefficients of thermal expansion, which would then have to be accountedor in the above Equation (2).

While the first contact element 110 is a substantially rigid element,the second contact element 111 is formed such that its second contactnose 111.1 is supported in a manner to be resilient in a directionparallel to the optical axis 107.1 of the optical element 107. To thisend, the second contact nose 111.1 is connected to a base part 111.3 ofthe second contact element 111 via two leaf spring arms 111.4.

The second contact nose 111.1 protrudes from the second contact element111 in such a manner that the arms 111.4 are elastically deflected whenthe base part 111.3 is screwed to the lens holder 108. As a consequence,the second contact nose 111.1 exerts a clamping force F1 onto the secondcontact surface 107.5 of the lens 107, said clamping force F1 beingsubstantially perpendicular to the second contact surface 107.5. Theamount of the clamping force may be adjusted by a spacer 111.5 ofsuitable thickness placed between the base part 111.3 and the lensholder 108.

The first contact nose 110.1 protruding from the first contact element110 exerts a counteracting force F2 onto the first contact surface 107.3of the lens 107, said counteracting force F2 being substantiallyperpendicular to the first contact surface 107.3. The first contact nose110.1 and the second contact nose 111.1 are arranged such that thecounteracting force F2 is collinear with the clamping force F1 andcounteracts the clamping force F1. In other words, the lens is clampedbetween the respective first contact element 110 and the associatedsecond contact element 111.

The first contact surface 107.3 and the second contact surface 107.5 aresubstantially perpendicular to the optical axis 107.1 of the lens. Thus,at the first temperature situation T1, substantially no radial forcesdirected radially towards the center of the lens 107 are introduced intothe lens by its holding mechanism.

At a second temperature situation T2 different from the firsttemperature situation T1, the temperature within the components of theoptical element unit 3 is raised by a given amount. As a consequence ofthe raised temperature, among others, the lens 107 and the lens holder108 expand in a radial direction 116. Since the second coefficient ofthermal expansion of the lens holder 108 is higher than the firstcoefficient of thermal expansion of the lens 107, the raise in thetemperature causes a relative movement between the lens 107 and the lensholder 108 in the radial direction 116 such that the lens holder 108radially moves away from the lens 107. In other words, the contactlocation distance D(T;α_(L);α(_(R)) increases according to Equation (1).

In conventional systems with a conventional clamping mechanism, thiswould lead to a relative radial movement and a residual elasticdeformation at the interface between the respective contact element andthe lens, both leading to the introduction of stresses into the opticalelement radially propagating through the optically used area of thelens. As previously explained, such radial stresses lead to imagingerrors such as stress induced birefringence.

However, the first contact element 110 and the second contact element111 compensate for this difference in the first and second coefficientof thermal expansion such that, at the second temperature situation T2,there is substantially no shift between the first contact point 107.2and the second contact point 110.2 as well as substantially no shiftbetween the third contact point 107.4 and the fourth contact point111.2.

To this end, the first contact elements 110 and the second contactelements 111 are made of a steel material having a third coefficient ofthermal expansion different from the first and second coefficient ofthermal expansion of the lens 107 and the lens holder 108, respectively.The third coefficient of thermal expansion is higher than the first andsecond coefficient of thermal expansion.

For the first contact elements 110, at least one of the second location113 and the third coefficient of thermal expansion α_(E) are selectedsuch that

E(T2;α_(E))=D(T2;α_(L);α_(R))=R(T2;α_(R))−L(T2;α_(L))   (3)

The same applies for the second contact elements 111, i.e. at least oneof the fourth location 115 and the third coefficient of thermalexpansion α_(E) are selected such that Equation (3) is valid.

In other words, due to the higher thermal expansion of the first andsecond contact elements 110 and 111, the respective contact element 110,111, at the given temperature situation variation between the first andsecond temperature situation T1 and T2, spans the gap between the lens107 and the lens holder 108 that results from the difference in thefirst and second coefficient of thermal expansion of the lens 107 andthe lens holder 108, respectively. Thus, at the second temperaturesituation T2 as well, despite the thermal expansion of the modulecomponents, substantially

The first and second contact elements do not necessarily have to befixedly mounted to the optical element holder. It will be appreciatedthat, with other embodiments of the disclosure, in the manner of akinematic reversal, at least one of the respective first and secondcontact element may be fixedly mounted to the optical element andcontact the optical element holder in the manner as it has beendescribed above for the contact between the contact elements 110, 111and the lens 107.

It will be appreciated that, with other embodiments of the disclosure,other materials or combinations may be chosen. In any case, thecompensation of the difference in the coefficient of thermal expansionbetween the lens holder and the lens by suitably selecting the material(i.e. the coefficient of thermal expansion), the size, and the locationof the respective contact element.

It will be further appreciated that the compensation of the differencein the first coefficient of thermal expansion of the lens 107 and thesecond coefficient of thermal expansion of the lens holder 108 providedby the first and second contact elements 110 and 111 may be effectiveduring the entire temperature situation variation, i.e. the transitionbetween the first temperature situation T1 and the second temperaturesituation T2. However, depending on the change in the temperatureprofile in the module components (lens 107, lens holder 108 and contactelements 110, 111) during the temperature situation variation, the firstand second contact elements 110 and 111 may not provide for a completecompensation during the entire temperature situation variation.

Thus, it may be that, during the transition between the firsttemperature situation T1 and the second temperature situation T2,certain thermally induced radial disturbing forces are introduced intothe lens 107. However, the disclosure also provides for a reduction ofthese thermally induced radial disturbing by the following means.

First of all, as may be seen from FIG. 3, a gravity compensation means117 is provided. This gravity compensation means 117 is mounted to thelens holder 108 and located close to the outer circumference of the lens107. The gravity compensation means 117, in sum, exerts a force onto thelens that balances the gravitational force acting onto the lens 107 dueto its mass.

To this end, the gravity compensation means 117 comprises forcegenerating means 117.1 contacting the first contact surface 107.3 of thelens 107 over a certain fraction of the outer circumference of the lens107. In the embodiment of FIG. 3, three force generating means 117.1 areextend over substantially the entire part of the circumference of thelens 107 that is not taken by the first contact elements 110.

Each force generating means 117.1 exerts a line force onto the lens 107that is parallel to the optical axis 107.1 of the lens. The forcegenerating means 117.1 is provided in the form of a helical spring withelliptical coils that are inclined with respect to the spring axis suchas a so called BAL SPRING® manufactured by Bal Seal Engineering Co.Inc., Pauling, Calif., U.S.A. However, it will be appreciated that, withother embodiments of the disclosure, another number and other types offorce generating means, e.g. leaf spring elements, magnetic or pneumaticelements etc., may be used for the gravity compensation means.

The force generating means 117.1 is supported on a support element 117.2fixedly connected to the inner circumference of the lens holder 108.Here again, similar to the first contact element 110, the supportelement 117.2 may be made of a material with a coefficient of thermalexpansion as well as mounted and designed such that it compensates forthe difference in the first coefficient of thermal expansion of the lens107 and the second coefficient of thermal expansion of the lens holder108. In other words, the support element 117.2 may be designed suchthat, upon the above temperature situation variation, there issubstantially no shift in the contact points between the forcegenerating means 117.1 and the lens 107.

This avoids introduction of radial disturbing forces into the lens viathe gravity compensation means 117. However, it will be appreciated thatthis complete compensation may also be omitted to some extent. Forexample a radial relative movement may be admitted between the forcegenerating means 117.1 and the lens 107 upon thermal expansion since theforce generating means 117.1, due to its design, may execute a rollingmovement with respect to the first contact surface 107.3 of the lens107. Such a rolling movement is associated with a very low rollingfriction acting onto the lens 107 and, thus, leads to a considerablyreduced introduction of disturbing radial forces into the lens 107. Tofurther reduce the frictional forces introduced into the lens 107 atleast one of the force generating means 117.1 and the first contactsurface 107.3 of the lens 107 may be provided with a low frictioncoefficient contact surface, e.g. with a friction coefficient coating atthe respective contact surface.

An advantage of the gravity compensation means 117 lies within the factthat the normal reaction force acting between the first contact elements110 and the lens 107 perpendicular to the first contact surface 107.3does not have to include a component resulting from the balancing of thegravitational force acting onto the lens 107. Thus, the first contactelements 110 only exert a reduced normal contact force only balancingthe clamping force exerted by the associated second contact elements111. This reduced normal contact force has the advantage that upon anythermally induced radial relative movement between the lens 107 and thefirst contact elements 110 only a reduced frictional disturbing forceacts in the radial direction 116 onto the lens 107, said frictionaldisturbing force being a function of the normal contact force and thefriction coefficient at the contact location.

A further reduction of the frictional disturbing force acting onto thelens 107 upon any thermally induced radial relative movement between thelens 107 and the contact elements 110 and 111 may be achieved byproviding at least one of the lens 107 and the first and second contactnose 110.1 and 111.1 with a low friction coefficient contact surface,e.g. with a low friction coefficient coating at the respective contactsurface, i.e. the first and second contact surface 107.3 and 107.5.and/or the contact surface of the first and second contact nose 110.1and 111.1. By this means as well only a reduced frictional disturbingforce acts in the radial direction 116 onto the lens 107 upon such athermally induced radial relative movement, said frictional disturbingforce being a function of the normal contact force and the frictioncoefficient at the respective contact location.

As mentioned above, the lens holder 108 is held by a ring shaped frameelement 109. The frame element 109 itself may form a part of the housing3.1 of the optical element unit 3 or may be connected to a separatepart, said separate part then forming a part of the housing 3.1.

The lens holder 108 has a first axis of symmetry 108.1 substantiallycoinciding with the optical axis 107.1. The same applies to the frameelement 109, i.e. the frame element 109 has a second axis of symmetry109.1 substantially coinciding with the optical axis 107.1 as well.

For reasons of reduced weight and good thermal conductivity, the frameelement 109 is made of aluminum. Thus, the frame element 109 has afourth coefficient of thermal expansion different from the secondcoefficient of thermal expansion of the lens holder 108. To account forthis fact, the lens holder 108 is connected to the frame element 109 viaa plurality of radial deformation uncoupling elements 109.1 evenlydistributed at the inner circumference of the frame element 109.

The lens holder 108 is connected to the frame element 109 via one screw118 per deformation uncoupling element 109.1. To avoid distortion of thedeformation uncoupling elements 109.1 when tightening the screws 118, aprotection ring 119 is placed between the heads of the screws 118 andthe deformation uncoupling elements 109.1.

In the following, a preferred embodiment of a method of holding anoptical element according to the present disclosure will be describedwith reference to FIGS. 1 to 4.

FIG. 4 shows a block diagram of a preferred embodiment of a method ofholding an optical element.

In a first step 20, a plurality of module components 107, 108, 109, 110,111, 117 of the optical element module 3.3 is provided. At least one ofthese module components is adapted to provide at least a reduction offorces introduced into the lens 107 upon a thermally induced positionchange in the relative position between the lens 107 and the lens holder108.

As mentioned above, the plurality of module components comprises thelens 107 as it has been described above in the context of FIGS. 2 and 3.The lens 107 is provided in a step 20.1.

The plurality of module components further comprises the lens holder 108and the frame element 109 as they have been described above in thecontext of FIGS. 2 and 3. The lens holder 108 and the frame element 109are provided in a step 20.2

The plurality of module components further comprises the first andsecond contact elements 110 and 111 as they have been described above inthe context of FIGS. 2 and 3. The first and second contact elements 110and 111 are provided in a step 20.3. In this step 20.3 the first andsecond contact elements 110 and 111 are designed such that they maycompensate for the difference in the coefficient of thermal expansionbetween the lens 107 and the lens holder 108 at a temperature situationvariation as it has been described above in the context of FIGS. 2 and3.

In a step 21.1 of a second step 21, the module components of the opticalelement module 3.3 are mounted together such that the lens 107, at afirst temperature situation, is held by the lens holder 108 via thefirst and second contact elements 110 and 111 to provide a configurationas it has been described above in the context of FIGS. 2 and 3.

In a step 21.2 a temperature situation variation is provided wherein thetemperature situation of the optical element module 3.3 changes from thefirst temperature situation T1 to the second temperature situation T2 asit has been described above in the context of FIGS. 2 and 3.

In a step 21.3 the lens 107, at said second temperature situation T2, isheld by the lens holder 108 via the first and second contact elements110 and 111 to provide a configuration as it has been described above inthe context of FIGS. 2 and 3. As it has been described above in thecontext of FIGS. 2 and 3, the first and second contact elements 110 and111 are designed and mounted to the lens holder 108 such that theycompensate for the difference in the coefficient of thermal expansionbetween the lens 107 and the lens holder 108. Thus, at the secondtemperature situation T2 as well, the lens 107 is held such thatsubstantially not thermally induced radial disturbing forces areintroduced into the lens 107.

Second embodiment

In the following, a second preferred embodiment of an optical elementmodule 3.4 will be described with reference to FIGS. 1 and 5. FIG. 5shows a schematic sectional representation of a part of the opticalelement module 3.4 of the optical element unit 3 at a first temperaturesituation T1 of the optical element unit 3. The first temperaturesituation T1 is characterized by a certain temperature profile withinthe components of the optical element unit 3.

The optical element 207 of the optical element module 3.4 is arotationally symmetric lens having an optical axis 207.1. The lens 207is made of Quartz (SiO₂) and has a first coefficient of thermalexpansion.

The lens 207 is usually positioned in space such that the optical axis207.1 of the lens 207 is substantially collinear with the optical axis3.2 of the optical element unit 3. It should be noted that the positionof the optical axis 207.1 of the lens 207 shown in FIG. 5 is not toscale. In reality, the optical axis 207.1 is located at a distance fromthe outer circumference of the lens 207 that by far exceeds the distanceshown in FIG. 5.

The lens 207 is held by an optical element holder in the form of a ringshaped lens holder 208 which, in turn, may be held by a ring shapedframe element similar to frame element 109 of FIG. 2. The lens holderhas a first axis of symmetry 208.1 which coincides with the optical axis207.1.

The lens holder 208 is made of Invar that has a second coefficient ofthermal expansion different from, namely larger than the firstcoefficient of thermal expansion of the lens 207. The lens holder 208holds the lens 207 in place via a plurality of first contact elements210 and a plurality of second contact elements 211.

In the embodiment shown, three first contact elements 210 and threesecond contact elements 211 are evenly distributed at the innercircumference of the lens holder 208. However, it will be appreciatedthat, with other embodiments of the disclosure, a different number offirst and/or second contact elements may be provided. Furthermore, onlyone type of contact elements may be provided. For example, only thelower first contact elements may be provided to support the lens frombelow.

The first contact element 210 is a cylindrical roller of circular crosssection. The first contact element 210 is supported on a plane annularfirst platform 208.2 of the lens holder 208. The plane of the platform208.2 is substantially perpendicular to the axis 208.1 and, thus,perpendicular to the optical axis 207.1. The first contact element 210contacts a plane first contact surface 207.3 of the lens 207, the firstcontact surface 207.3 being perpendicular to the optical axis 207.1.

The second contact element 211 is also a cylindrical roller of circularcross section. The second contact element 211 contacts a plane secondcontact surface 207.5 of the lens 207, the second contact surface 207.3also being perpendicular to the optical axis 207.1. The second contactelement 211 furthermore contacts a plane annular second platform 208.3formed on a contact ring 208.4 of the lens holder 208. The plane of thesecond platform 208.3 is also substantially perpendicular to the axis208.1 and, thus, perpendicular to the optical axis 207.1.

The first contact element 210 and the second contact element 211, in thesituation shown in FIG. 5, are arranged such that they are properlyaligned in an axial direction parallel to the optical axis 207.1. Thecylindrical surface of the first contact element 210 forms a curvedthird contact surface 210.3 that contacts the first contact surface207.3 of the lens 207. Furthermore, the cylindrical surface of thesecond contact element 211 forms a curved fourth contact surface 211.3that contacts the second contact surface 207.5 of the lens 207.

To clamp the lens 207 between the first contact element 210 and thesecond contact element 211, a resilient clamping element 208.5 isconnected to the lens holder 208. The clamping element is designed inthe manner of the second contact element 111 of FIG. 2. Thus it has aclamping nose 208.6 connected via resilient arms 208.7 to a base part208.8, which in turn is mounted to the lens holder 208.

The clamping nose 208.6 protrudes in such a manner that the arms 208.7are elastically deflected when the base part 208.8 is connected to thelens holder 208. As a consequence, the clamping nose 208.6, via thecontact ring 208.4 and the second contact element 211, exerts a clampingforce F1 onto the second contact surface 207.5 of the lens 207, saidclamping force F1 being substantially perpendicular to the secondcontact surface 207.5. The amount of the clamping force again may beadjusted by a spacer of suitable thickness placed between the base part208.8 and the lens holder 208.

Since the first contact surface 207.3 and the second contact surface207.5 are substantially perpendicular to the optical axis 207.1 of thelens 207, at the first temperature situation T1, substantially no radialforces directed radially towards the center of the lens 207 areintroduced into the lens 207 by its holding mechanism.

At a transition to a second temperature situation T2 different from thefirst temperature situation T1, the temperature within the components ofthe optical element unit 3 is raised by a given amount. As a consequenceof the rising temperature, among others, the lens 207 and the lensholder 208 expand in a radial direction 216. Since the secondcoefficient of thermal expansion of the lens holder 208 is higher thanthe first coefficient of thermal expansion of the lens 207, the raise inthe temperature causes a relative movement between the lens 207 and thelens holder 208 in the radial direction 216 such that the lens holder208 radially moves away from the lens 207.

As mentioned above, in conventional systems with a conventional clampingmechanism directly acting onto the lens, this would lead to a relativeradial movement and a residual elastic deformation at the interfacebetween the respective contact element and the lens, both leading to theintroduction of stresses into the optical element radially propagatingthrough the optically used area of the lens. As previously explained,such radial stresses lead to imaging errors such as stress inducedbirefringence.

However, the curved third contact surface 210.3 of the first contactelement 210 and the curved fourth contact surface 211.3 of the secondcontact element 211, at this thermally induced relative movement betweenthe lens 207 and the lens holder 208, both execute a rolling movement onthe first contact surface 207.3 and the second contact surface 207.5,respectively. The curved third contact surface 210.3 and the curvedfourth contact surface 211.3 also execute a rolling movement on thefirst platform 208.2 and the second platform 208.3, respectively. Sinceboth contact elements 210 and 211 have the same diameter, the contactelements 210 and 211 perform a synchronous rotation such that they keepbeing aligned in a direction parallel to the optical axis 207.1.

This rolling movement is associated with very low frictional forcesintroduced into the lens 207 and directed in the radial direction 216.It will be appreciated that, in other words, the rolling movement is asubstantially pure rolling movement with substantially no friction. Thesubstantially negligible residual friction that occurs here results fromthe deformation induced deviation of the contact area from the idealline contact of the cylindrical contact element 210, 211 with itsrespective contact partner. Thus, a considerable reduction of thermallyinduced radial disturbing forces is achieved with the disclosurecompared to conventional systems without such rolling contact elements.Thus disturbing radial stresses leading to imaging errors such as stressinduced birefringence may be reduced considerably with the disclosure.

It will be appreciated that, with other embodiments of the disclosure,the respective first and second contact element does not necessarilyhave to contact the lens directly. For example, intermediate elementsmay be connected to the lens and contact the respective contact element.These intermediate elements may also be a clamping element designed inthe manner of the clamping element 208.5 as it has been described above.

As outlined above, certain considerably reduced thermally induced radialdisturbing forces may be introduced into the lens 207 at a temperaturesituation variation. However, the disclosure also provides for a furtherreduction of these thermally induced radial disturbing by the followingmeans.

First of all, as had been explained in the context of FIG. 3, a gravitycompensation means similar to the gravity compensation means 117 isprovided. This gravity compensation means has the effect that the normalreaction force acting between the first contact elements 210 and thelens 207 perpendicular to the first contact surface 207.3 does not haveto include a component resulting from the balancing of the gravitationalforce acting onto the lens 207. Thus, the first contact elements 210only exert a reduced normal contact force only balancing the clampingforce exerted by the associated second contact elements 211. Thisreduced normal contact force has the advantage that upon any thermallyinduced radial relative movement between the lens 207 and the firstcontact elements 210 only an even further reduced frictional disturbingforce acts in the radial direction 216 onto the lens 207, saidfrictional disturbing force being a function of the normal contact forceand the friction coefficient at the contact location.

A further reduction of the frictional disturbing force acting onto thelens 207 upon any thermally induced radial relative movement between thelens 207 and the contact elements 210 and 211 may be achieved byproviding at least one of the lens 207 and the first and second contactelements 210 and 211 with a low friction coefficient contact surface,e.g. with a low friction coefficient coating at the respective contactsurface, i.e. the first and second contact surface 207.3 and 207.5and/or the third or fourth contact surface 210.3 and 211.3. By thismeans as well, only an even further reduced frictional disturbing forceacts in the radial direction 216 onto the lens 207 upon such a thermallyinduced radial relative movement, said frictional disturbing force beinga function of the normal contact force and the friction coefficient atthe respective contact location.

Finally, a further reduction of the frictional disturbing force actingonto the lens 207 upon any thermally induced radial relative movementbetween the lens 207 and the contact elements 210 and 211 may beachieved by providing a securing device 222. This securing device 222overall allows to reduce, under normal operating conditions, the holdingforces exerted on the lens 207 and, thus, also the disturbing frictionalforces introduced into the lens 207 at a thermally induced relativemovement between the lens 207 and the lens holder 208 under normaloperating conditions.

This solution is based on the concept that the holding forces usuallycounteract also the thermally induced relative movement between the lens207 and the lens holder 208 and, thus, have an influence on thefrictional forces introduced into the lens 207 at such a relativemovement between the lens 207 and the lens holder 208. Usually, due tothe manufacture and mounting of the optical element unit 3 at a locationdifferent from the location of its later use, the holding forcesprovided for the lens 207 do not only account for the forces occurringunder normal operating conditions of the optical system but also have toaccount for considerably higher abnormal forces occurring duringtransport of the optical element unit 3, for example. Thus, inconventional systems, holding forces exerted onto the lens 207 areconsiderably higher than necessary in normal use. Due to the correlationbetween the holding forces and the disturbing forces outlined above,this obviously leads to increased disturbing forces introduced into thelens 207 at a thermally induced relative movement between the lens 207and the lens holder 208.

The securing device 222, further reduces these disturbing forces byallowing a reduction of the holding forces exerted on the lens 207 undernormal operating conditions. The securing device 222 is only activatedunder abnormal load conditions in order to hold the lens 207. To thisend, the securing device 222 is fixedly mounted to the lens holder 208and provides a stop element 222.1 that is spatially associated to theresiliently mounted clamping nose 208.6 of the respective clampingelement 208.5.

The clamping element 208.5, via the second contact element 211, undernormal operating conditions of the optical element unit 3, i.e. under anormal load situation, exerts a first holding force onto the lens 207.This first holding force ranges up to a holding force limit is a maximumforce that is necessary (together with the holding forces of the otherclamping elements 208.5) to hold the lens 207 substantially in placeagainst normal displacement forces to be expected to act onto the lens207 under said normal load situation.

As long as the displacement forces acting onto the lens 207 do notrequire exertion of this holding force limit, a small gap 223 is formedbetween the stop element 222.1 and the clamping nose 208.6. As soon asthe holding force limit is reached, the clamping nose 208.6 comes intotight contact with the substantially rigid stop element 222.1 such thatthe holding forces exerted in the lens 207 abruptly increase to hold thelens 207 in place against abnormal displacement forces exceeding thedisplacement forces acting under normal operating conditions of theoptical element unit 3.

It should be noted that the gap 223 shown in FIG. 5, for reasons ofbetter visibility, is way out of scale. In reality, the gap 223 issufficiently small to provide sufficient contact between the lens 207and the contact elements 210, 211 under any load condition.

It will be appreciated that, with other embodiments of the disclosure,the securing device may adapted to contact any other movable part of theclamping element 208.5 or any other suitable part of the lens 207 or anyother movable component in mechanical connection with the lens 207.Furthermore, the clamping element may be of any other suitable designthat is activated under abnormal load conditions only. For example, itmay be an active device, e.g. a electrically, pneumatically or otherwiseactuated device, that is actively brought into contact with the lens207, the clamping nose 208.6 or any other movable component inmechanical connection with the lens 207 under abnormal load situations.

It will be further appreciated that the securing device 222 may also beused in combination with the embodiment shown in FIG. 2 leading to theabove beneficial reduction in the necessary holding forces under normaloperating conditions.

It will be further appreciated that, with other embodiments of thedisclosure, the respective first and second contact element does notnecessarily have to be a cylindrical element. It is only necessary thatthe respective contact element has a curved contact surface thatexecutes, upon a temperature situation variation, a substantially purelyrotational movement on an interface surface between the lens and thelens holder where the relative motion occurs. For example, therespective contact element may be a ball shaped element. In this case,the contact partner of the contact element does not necessarily have toprovide one single planar contact surface. For example, it is alsopossible that the ball shaped contacts the two contact surfaces of asubstantially V-shaped groove extending in the radial direction. Theball shaped contact element, upon a temperature situation variation,then may execute the substantially frictionless rolling movement alongthis V-shaped groove. Furthermore, the respective contact element may befixedly connected to one of the lens 207 and the lens holder 208.

FIGS. 6A and 6B show different views of an example of a contact element310 that may replace the first contact element 210 and/or the secondcontact element 211 of FIG. 5. The contact element 310 has a movablecontact part 310. 4 with a spherical contact surface 310.3. Via aflexure 310.5, the spherical contact part 310.4 is monolithicallyconnected to a base part 310.6. The base part 310.6 may be connected tothe lens holder 208 or the lens 207, such that the flexural axis 310.7of the flexure 310.5 runs perpendicular to the radial direction 216 in aplane perpendicular to the optical axis 207.1 of the lens 207.

It will be appreciated that the optical element unit 3.4 of FIG. 5 mayas well be used to perform a method of holding an optical elementsimilar to the one as it has been described above with reference to FIG.4.

The difference with respect to the method performed with the embodimentof FIG. 2 lies within the fact that, upon any change in the temperaturesituation, i.e. in step 21.2 of FIG. 4, a relative motion takes place atthe mechanical interface between the lens 207 and the lens holder 208.However, this relative motion is a low friction motion, namely a rollingmotion.

Third Embodiment

In the following, a third preferred embodiment of an optical elementmodule 3.5 will be described with reference to FIGS. 1, 7A and 7B. FIGS.7A and 7B show representations of a part of the optical element module3.5 of the optical element unit 3.

The optical element 407 of the optical element module 3.5 is arotationally symmetric lens having an optical axis which, when mountedin the optical element unit 3, lies in a substantially horizontal plane.

The lens 407 is made of Quartz (SiO₂) and is held by an optical elementholder in the form of a ring shaped lens holder 408. The lens holder hasa first axis of symmetry which coincides with the optical axis of thelens 407. The lens holder 408 is made of Invar that has a secondcoefficient of thermal expansion different from, namely larger than thefirst coefficient of thermal expansion of the lens 407. The lens holder408 holds the lens 407 in place via a plurality of first contactelements 410 and a plurality of second contact elements 411 in a manneras it has been described above in the context of FIG. 2, such that it ishere mainly referred to the above explanations.

The optical element module 3.5 also has a gravity compensation device417. This gravity compensation device 417—as the gravity compensationdevice 117—is adapted to exert a support force onto the lens 407 thatsubstantially balances the gravitational force acting on the lens 407due to its mass.

Due to the so called standing arrangement of the lens 407, the gravitycompensation device 417 comprises a flexible tension element 417.1 inthe form of a rope or strap. The tension element 417.1 has a middlesection 417.3 and two end sections 417.4 and 417.5. Both end sections417.4 and 417.5 are hung to the lens holder 408 at a location locatedabove the center of gravity of the lens 407 such that the middle section417.3 is wrapped around a lower part of the lens 407.

The force exerted by the gravity compensation device 417 onto the lens407 may be adjusted by adjusting the pretension of springs 417.6 actingvia nuts 417.7 onto threaded bolts 417.8 connected to the tensionelement 417.1 at its respective end section 417.4 and 417.5. The angleof wrap is about 170° such that the forces exerted by the gravitycompensation device 417 onto the lens 407 are distributed over a widearea avoiding local stress concentrations.

The lens 407 may be located in a seat within the lens holder 408precisely defining the position of the lens in the radial direction,i.e. in the vertical plane. Anyway, it will be appreciated that theforces exerted by the gravity compensation device 417 may slightlyexceed the gravitational force acting on the lens 407 such that the lens407 is pulled against a plurality of stops—preferably two stops—providedon the lens holder 408 at the upper circumference of the lens 407 tosecure the position of the lens in the vertical plane.

Furthermore, one or several further stops may be provided at the lowerpart of the lens holder 408 which the lens 407 may contact in case ofabnormal vertical loads acting onto the lens 407, e.g. during transportof the optical element unit 3.

Fourth Embodiment

In the following, a fourth preferred embodiment of an optical elementmodule 3.6 will be described with reference to FIGS. 1, 8A and 8B. FIGS.8A and 8B show representations of a part of the optical element module3.6 of the optical element unit 3.

The optical element 507 of the optical element module 3.6 is arotationally symmetric mirror having an optical axis which, when mountedin the optical element unit 3, lies in a substantially horizontal plane.

The mirror 507 is held by an optical element holder in the form of aring shaped mirror holder 508. The mirror holder has a first axis ofsymmetry which coincides with the optical axis of the mirror 507. Themirror holder 508 is made of a material that has a second coefficient ofthermal expansion different from, namely larger than the firstcoefficient of thermal expansion of the mirror 507. The mirror holder508 holds the mirror 507 in place via a plurality of first contactelements 510 and a plurality of second contact elements 511 in a manneras it has been described above in the context of FIG. 2, such that it ishere mainly referred to the above explanations.

The optical element module 3.6 also has a gravity compensation device517. This gravity compensation device 517—as the gravity compensationdevices 117 and 417—is adapted to exert a support force onto the mirror507 that substantially balances the gravitational force acting on themirror 507 due to its mass.

Due to the so called standing arrangement of the mirror 507, the gravitycompensation device 517 comprises a plurality of resilient forceexerting elements 517.1 in the form of leaf spring elements. The leafspring elements 517.1 are formed by slots in an arc shaped base element517.9 fixedly connected to the mirror holder 508 at a location locatedbelow the center of gravity of the mirror 507. The base element 517.9 isarranges symmetrically with respect to the vertical axis of symmetry507.6 of the mirror 507.

The free ends of the leaf spring elements 517.1 contact the outercircumference of the mirror 507 over an angle of about 90° in a lowerpart of the mirror 507. However, it will be appreciated that otherangles may be chosen, where appropriate. The leaf spring elements 517.1are adapted such that the force exerted onto the mirror by therespective leaf spring element 517.1 decreases with increasing distancefrom the vertical axis 507.6 of the mirror 507. Thus, proper supportcorresponding to the mass distribution of the mirror is achieved.

Again, the mirror 507 may be located in a seat within the mirror holder508 precisely defining the position of the mirror in the radialdirection, i.e. in the vertical plane. Anyway, it will be appreciatedthat the forces exerted by the gravity compensation device 517 mayslightly exceed the gravitational force acting on the mirror 507 suchthat the mirror 507 is pushed against a plurality of stops—preferablytwo stops—provided on the mirror holder 508 at the upper circumferenceof the mirror 507 to secure the position of the mirror in the verticalplane.

Furthermore, one or several further stops may be provided at the lowerpart of the mirror holder 508 which the mirror 507 or the leaf springs517.1 may contact in case of abnormal vertical loads acting onto themirror 507, e.g. during transport of the optical element unit 3.

Although, in the foregoing, embodiments of the present disclosure havebeen described where the optical element has a circular shape, it willbe appreciated that, with other embodiments of the present disclosure,the optical element may have any other shape. The same applies for theoptical element holder.

Furthermore, the present disclosure has been described mostly in thecontext of embodiments where refractive optical elements such as lensesand plane parallel plates are held by respective optical elementholders. However, it will be appreciated that, with other embodiments ofthe present disclosure, other types of optical elements, such asreflective and/or diffractive optical elements, e.g. mirrors or gratingsor the like, may be held by a corresponding optical element holder as ithas been described above.

Furthermore, the present disclosure has been described in the context ofan optical element unit incorporating different designs of opticalelement modules. However, it will be appreciated that the disclosure mayalso be used in the context of optical element units incorporating onesingle design or type of optical element module.

Furthermore, the present disclosure has been described in the context ofan optical element unit having a folded optical axis. However, it willbe appreciated that the disclosure may also be used in the context ofoptical element units having a straight optical axis or an arbitrarilyoften folded optical axis.

Finally, the present disclosure has been described in the context ofembodiments for optical exposure processes. However, it will beappreciated that the disclosure may also be used in the context of anyother optical application, where a relief of an optical element fromstresses resulting from thermal expansion in the region of therespective optical element is required.

1. An optical element module comprising: an optical element, an opticalelement holder and a first contact element; the optical element having afirst coefficient of thermal expansion; the optical element holderholding the optical element via the first contact element and having asecond coefficient of thermal expansion, the second coefficient ofthermal expansion being different from the first coefficient of thermalexpansion; a first contact point being formed on a first modulecomponent, the first module component being one of the optical elementand the optical element holder; the first contact element having asecond contact point and a third coefficient of thermal expansion; thefirst contact point, at a first temperature situation, contacting thesecond contact point at a first location; the first contact elementcontacting a second module component at a second location, the secondlocation, at the first temperature situation, being located at a firstcontact location distance from the first location; the second modulecomponent being different from the first module component and being oneof the optical element and the optical element holder; at least one ofthe third coefficient of thermal expansion and the contact locationdistance being selected such that, at a given second temperaturesituation different from the first temperature situation, a thermallyinduced modification in the size of the first contact element withrespect to the first temperature situation compensates for thedifference between the first coefficient of thermal expansion and thesecond coefficient of thermal expansion such that, at the secondtemperature situation, there is substantially no shift between the firstcontact point and the second contact point.
 2. The optical elementmodule according to claim 1, wherein the optical element forms the firstmodule component and the optical element holder forms the second modulecomponent.
 3. The optical element module according to claim 1, whereinthe optical element holder comprises a first material and the firstcontact element comprises a second material different from the firstmaterial.
 4. The optical element module according to claim 1, whereinthe optical element comprises quartz (SiO₂), the optical element holdercomprises Invar, and the first contact element comprises steel.
 5. Theoptical element module according to claim 1, wherein the thirdcoefficient of thermal expansion is considerably higher than the secondcoefficient of thermal expansion.
 6. The optical element moduleaccording to claim 1, wherein the optical element mainly extends in afirst plane and has a centrally located optical element axisperpendicular to the first plane, and the first contact point is locatedat a first contact surface of the optical element, the first contactsurface being perpendicular to the optical element axis.
 7. The opticalelement module according to claim 1, wherein the optical element has anouter circumference and a plurality of first contact elements contactingthe optical element and the optical element holder are distributed atthe outer circumference.
 8. The optical element module according toclaim 7, wherein the optical element holder comprises a ring shapedholder unit; the holder unit extending along the outer circumference ofthe optical element and contacting the first contact element.
 9. Theoptical element module according to claim 8, wherein a ring shaped frameunit is provided; the frame unit extending along an outer circumferenceof the optical element holder and holding the optical element holder viaa plurality of deformation uncoupling elements.
 10. The optical elementmodule according to claim 9, wherein the frame unit comprises a materialbeing, at least with respect to its coefficient of thermal expansion,different from a material the optical element holder comprises.
 11. Theoptical element module according to claim 1, wherein a second contactelement is provided; the second contact element contacting the opticalelement and the optical element holder and having a fourth coefficientof thermal expansion.
 12. The optical element module according to claim11, wherein the second contact element comprises a material being, atleast with respect to its coefficient of thermal expansion, differentfrom a material the optical element holder comprises.
 13. The opticalelement module according to claim 11, wherein the optical elementcomprises quartz (SiO₂), the optical element holder comprises Invar, andthe second contact element comprises steel.
 14. The optical elementmodule according to claim 11, wherein the fourth coefficient of thermalexpansion is considerably higher than the second coefficient of thermalexpansion.
 15. The optical element module according to claim 11, whereinthe optical element has an outer circumference and a plurality of secondcontact elements contacting the optical element and the optical elementholder are distributed at the outer circumference.
 16. An opticalelement module comprising: a plurality of module components; the modulecomponents comprising an optical element, an optical element holder anda contact element; the optical element having a first coefficient ofthermal expansion; the optical element holder holding the opticalelement via the first contact element and having a second coefficient ofthermal expansion, the second coefficient of thermal expansion beingdifferent from the first coefficient of thermal expansion; at least oneof the module components being adapted to provide at least a reductionof forces introduced into the optical element upon a thermally inducedposition change in the relative position between the optical element andthe optical element holder; the position change resulting from atemperature situation variation in a temperature situation of theplurality of module components.
 17. The optical element module accordingto claim 16, wherein at least one of the first contact surface and thesecond contact surface is formed by a low friction coefficient coating.18. The optical element module according to claim 16, wherein thecontact element has a third coefficient of thermal expansion; the thirdcoefficient of thermal expansion being selected such that, at thetemperature situation variation, a thermally induced modification in thesize of the contact element compensates for the position change.
 19. Theoptical element module according to claim 16, wherein one of the opticalelement and the optical element holder forms a first module component; afirst contact surface being formed on the first module component; thecontact element having a curved second contact surface contacting thefirst contact surface; the first contact element being adapted such thatthe second contact surface executes a rolling motion with respect to thefirst contact surface upon the position change.
 20. An optical elementunit comprising: a plurality of optical element modules connected toeach other and supporting a plurality of optical elements, the pluralityof optical element modules comprising a first optical element modulebeing an optical element module according to claim
 1. 21. An opticalexposure apparatus for transferring an image of a pattern formed on amask onto a substrate comprising: a light path; a mask location locatedwithin the light path and receiving the mask; a substrate locationlocated at an end of the light path and receiving the substrate; anoptical element unit within the light path between the mask location andthe substrate location, the optical element unit comprising: a pluralityof optical element modules connected to each other and supporting aplurality of optical elements, wherein the plurality of optical elementmodules comprising a first optical element module being an opticalelement module according to claim
 1. 22. A method of holding an opticalelement comprising: in a first step, providing a plurality of modulecomponents, the module components comprising an optical element, anoptical element holder and a contact element, and, in a second step,holding the optical element using the optical element holder, theoptical element holder holding the optical element via the contactelement; the optical element having a first coefficient of thermalexpansion; the optical element holder having a second coefficient ofthermal expansion, the second coefficient of thermal expansion beingdifferent from the first coefficient of thermal expansion; at least oneof the module components being adapted to provide at least a reductionof forces introduced into the optical element upon a thermally inducedposition change in the relative position between the optical element andthe optical element holder; the position change resulting from atemperature situation variation in a temperature situation of theplurality of module components.
 23. The method according to claim 22,wherein in the first step, a contact element is provided, the contactelement having a third coefficient of thermal expansion; the thirdcoefficient of thermal expansion being selected such that, at thetemperature situation variation, a thermally induced modification in thesize of the contact element compensates for the position change.